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ISBN10: 0071445633 | ISBN13: 9780071445634

Photomask Fabrication Technology, 1st Edition

ISBN10: 0071445633
ISBN13: 9780071445634
By Benjamin G. Eynon and Banqiu Wu

© 2006 Published July 21, 2005

ISBN10: 0071445633 | ISBN13: 9780071445634

More information about this Print book can be found in the page section below.

$173.00
ISBN10: 0071445633 | ISBN13: 9780071445634

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Introduction

Data Preparation and Design

Pattern Generation

Pattern Transfer

Photomask Metrology

Defect Control and Finishing

Inspection, Repair, and Cleaning

Resolution Enhancement Techniques

Water Fabrication Issues

Future Developments

Appendices

References

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