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Photomask Fabrication Technology

ISBN10: 0071445633 | ISBN13: 9780071445634

Photomask Fabrication Technology

Photomask Fabrication Technology, 1st Edition

ISBN10: 0071445633
ISBN13: 9780071445634
By Benjamin Eynon and Banqiu Wu

© 2006 Published July 21, 2005

Out of Stock
ISBN10: 0071445633 | ISBN13: 9780071445634

More information about this Print book can be found in the page section below.

$173.00
ISBN10: 0071445633 | ISBN13: 9780071445634

More information about this Print book can be found in the page section below.

Introduction

Data Preparation and Design

Pattern Generation

Pattern Transfer

Photomask Metrology

Defect Control and Finishing

Inspection, Repair, and Cleaning

Resolution Enhancement Techniques

Water Fabrication Issues

Future Developments

Appendices

References

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