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Thin-Film Deposition: Principles and Practice

ISBN10: 0070585024 | ISBN13: 9780070585027

Thin-Film Deposition: Principles and Practice

Thin-Film Deposition: Principles and Practice, 1st Edition

ISBN10: 0070585024
ISBN13: 9780070585027
By Donald Smith

© 1995 Published March 1, 1995

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Thin Film Technology.Gas Kinetics.Vacuum Technology.Evaporation.Deposition.Epitaxy.Chemical Vapor Deposition.High-Energy Techniques.Plasma Processes.Film Characterization.

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